Dewetting of polymer films by ion implantation
Nanoelectronics Lab I, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang, 639798, Singapore
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Accepted: 11 December 2008
Published online: 27 January 2009
We report dewetting of thermodynamically stable, thick (∼ 100 nm) polystyrene films by titanium ion implantation. The dynamic dewetting patterns in time evolution are recorded. The dewetting mechanism is determined to be heterogeneous nucleation, where the defects and Ti nanoparticles formed by ion implantation serve as the nuclei. In addition, we observe abundant rims with regular polygonal shapes in dewetting patterns. This is attributed to fingering instability, which results from the balance between the driving force arisen from thermally induced surface tension gradient and the resistive forces from the combination of friction force, Laplace pressure and long-range van der Waals interactions. Finally, a model based on mass conservation is used to qualitatively describe the transition from circular to polygonal shaped rims at a critical diameter for holes.
PACS: 61.72.U- Doping and impurity implantation – / 68.35.bm Polymers, organics – / 68.47.Mn Polymer surfaces –
© EDP Sciences, SIF, Springer-Verlag Berlin Heidelberg, 2009